|
Gas Name
|
Chemical Formula
|
Specification %
|
Impurity ppm
|
|
Helium
|
He
|
99.995
|
TCH4 1 CO2 1 Ne 10 H2 3 CO 1 H2O 10
|
|
99.999
|
O2 1 TCH4 1 CO2 0.5 Ne 4 H2 1 CO 0.5 H2O 1
|
|
99.9995
|
O2 0.5 TCH4 0.1 CO2 0.2 Ne 1 H2 0.1 CO 0.1 H2O 1
|
|
Argon
|
Ar
|
99.99
|
O2 10 THC 10 N2 50 H2 5 H2O 15
|
|
99.999
|
O2 2 THC 2 N2 5 H2 1 H2O 4
|
|
99.9995
|
O2 1 THC 0.5 N2 2 H2 0.5 H2O 1
|
|
Hydrogen
|
H2
|
99.99
|
O2 5 CO2 5 N2 60 TCH4 10 CO 5 H2O 5
|
|
99.999
|
O2 1 CO2 1 N2 5 TCH4 1 CO 3 H2O 1
|
|
Nitrogen
|
N2
|
99.99
|
O2 50 CO2 10 N2 10 CO 5 H2O 15 CH4 30
|
|
99.999
|
O2 1 H2O 2 H2 1 THC 3
|
|
Oxygen
|
O2
|
99.995
|
Ar 20 CO2 1 N2 20 THC 2
|
|
Carbon Dioxide
|
CO2
|
99.995
|
O2 10 H2O 5 N2 20 CO 1 THC 10
|
|
99.999
|
O2 1 H2O 2 N2 5 CO 1 THC 1
|
|
Carbon Monoxide
|
CO
|
99.95
|
N2<350 O2<50 H2O<5
|
|
Sulfur Dioxide
|
SO2
|
99.97
|
O2+N2<100 H2O<10 <200
|
|
Nitrogen Monoxide
|
NO
|
99.5
|
N2O<4000 NO2<2000 N2<300 CO2<500
|
|
Nitrogen Dioxide
|
NO2
|
99.9
|
|
|
Nitrous Oxide
|
N2O
|
99.99
|
|
|
Neon
|
Ne
|
99.995
|
H2 2 N2 5 He 40 THC 1 O2+Ar 2 H2O 2
|
|
99.999
|
|